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Title:
GAS DILUTION SYSTEM
Document Type and Number:
Japanese Patent JP2004226077
Kind Code:
A
Abstract:

To suppress a great change of a dilution ratio caused by fluctuation of the pressure applied to a capillary.

Indoor air is taken, and refined air refined by an adsorbent 20 and silica gel 22 which is used as zero gas is pressurized by a pump 26 and sent to a zero gas pressure governor 30. The zero gas is adjusted to have a prescribed pressure by the pressure governor 30, and adjusted to have the flow rate of about 1 L/min by zero gas capillaries formed by connecting in parallel a plurality of capillaries 34-1 to 34-6. On the other hand, standard gas filled in a container is sent to a standard gas pressure governor 8 through a solenoid valve 4, supplied similarly to a capillary 12 with a prescribed pressure, and adjusted to have the flow rate of about 10 mL/min. The refined gas and the standard gas are mixed together in a gas mixing part 16, and thereby span gas having the objective concentration is acquired and supplied from a span gas outlet 18.


Inventors:
MEGA AKIMASA
Application Number:
JP2003010645A
Publication Date:
August 12, 2004
Filing Date:
January 20, 2003
Export Citation:
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Assignee:
SHIMADZU CORP
International Classes:
G01N1/00; (IPC1-7): G01N1/00
Attorney, Agent or Firm:
Shigeo Noguchi



 
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