To provide a gas sensor with sensitivity corresponding to gas to be detected by forming a ZnO thin film where the size of projections and recesses formed on its thin-film surface is adjusted when forming the ZnO thin film by the sol/gel method, and its manufacturing method.
In a method for manufacturing a gas sensor, acetic zinc dihydrate is dissolved to 2-methoxyethanol containing monoethanolamine and is subjected to hydrolysis by adjusting the amount of added distilled water, an obtained solution for coating is applied to the surface of a silicon substrate 11, then a ZnO thin film 12 that is obtained by heat treatment at 500°C in the air is used as the gas reactant of the gas sensor, and a detection electrode 13 consisting of a pair of platinum is formed on the ZnO thin film 12.
| JPS6046457 | HUMIDITY DETECTOR |
| JPH04204242 | ANALYTICAL DEVICE FOR OZONE IN SOLUTION |
| JPS57124248 | VALUATION APPARATUS OF OXYGEN SENSOR CAPACITY |
SHIBATA TSUTOMU
YAMAMOTO MICHIRO
