To provide a generating method of a pulse plasma in which a stable discharge condition is realized by applying a high frequency alternating current pulse wave using high frequency power source in the atmospheric pressure condition.

This is a method of generating a glow discharge by applying a pulsed electric field to opposing electrodes by installing a solid dielectric on at least one of the opposing face of the opposing electrodes under a pressure in the vicinity of the atmospheric pressure. By applying a high frequency alternating current pulse wave, a plasma is generated. In particular, by impressing an alternating current pulse wave at the start of the discharge, after applying an electric field of high voltage pulsed direct current is applied, a glow discharge plasma is generated.