Title:
GRAPHITE MATERIAL FOR ION IMPLANTING APPARATUS AND GRAPHITE MEMBER FOR ION IMPLANTING APPARATUS USING THE SAME
Document Type and Number:
Japanese Patent JP2004158226
Kind Code:
A
Abstract:
To provide a graphite material for an ion implanting apparatus in which an erosion and a particle drop in the case of irradiating with an ion beam are few.
In the graphite material for the ion implanting apparatus, a measured value by an ACT-JP method is 0.2 g/mm3 or more.
Inventors:
SAITO KIYOSHI
SUZUKI HITOSHI
TOJO JUN
ANDO ATSUKO
TOJO TETSURO
SUZUKI HITOSHI
TOJO JUN
ANDO ATSUKO
TOJO TETSURO
Application Number:
JP2002320699A
Publication Date:
June 03, 2004
Filing Date:
November 05, 2002
Export Citation:
Assignee:
TOYO TANSO CO
International Classes:
H01J37/317; H01L21/265; (IPC1-7): H01J37/317; H01L21/265