Title:
回折格子ホルダ、回折格子評価装置、および測定装置
Document Type and Number:
Japanese Patent JP5873775
Kind Code:
B2
Inventors:
Kenta Yaegashi
Naoya Nakai
Fujimoto Akira
Naoya Nakai
Fujimoto Akira
Application Number:
JP2012164259A
Publication Date:
March 01, 2016
Filing Date:
July 25, 2012
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G02B7/00; G01J3/02; G01J3/18; G01M11/00; G02B5/18
Domestic Patent References:
| JP2006201404A | ||||
| JP2006337284A | ||||
| JP2010190621A | ||||
| JP62131214A | ||||
| JP59081604A | ||||
| JP9096748A | ||||
| JP2218028A |
Attorney, Agent or Firm:
Yamato Tsutsui