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Patent Searching and Data


Title:
GRINDER
Document Type and Number:
Japanese Patent JP2010052075
Kind Code:
A
Abstract:

To provide a grinder for improving productivity by reducing a time until a grinding surface of a grinding wheel contacts with a workpiece and grinding actually starts without imparting damage to the workpiece.

A control means 10 includes a storage means for storing the thickness of the workpiece W before processing held at a chuck table 8. When moving a grinding unit 3 by operating a grinding unit feed mechanism 5 while supplying a grinding fluid to the grinding wheel 324 by operating a grinding fluid supply means 4, the control means operates the grinding unit feed mechanism at first feed speed to a feed speed changing position where an interval between the grinding surface of the grinding wheel and the workpiece before processing reaches a predetermined interval operates the grinding unit feed mechanism at second feed speed lower than the first feed speed but higher than grinding feed speed from the feed speed changing position to a grinding wheel rotation speed is reduced to a predetermined value, and feeds the grinding unit at the grinding feed speed to a grinding finishing position.


Inventors:
SUGITANI TETSUKAZU
Application Number:
JP2008218061A
Publication Date:
March 11, 2010
Filing Date:
August 27, 2008
Export Citation:
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Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B47/22; B24B7/22; H01L21/304
Domestic Patent References:
JPH11221757A1999-08-17
JP2003311592A2003-11-05
JP2004243474A2004-09-02
JP2004322247A2004-11-18
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki