Title:
GRINDING DEVICE AND SANDING PAD DRESSING METHOD FOR THE SAME
Document Type and Number:
Japanese Patent JP2003145411
Kind Code:
A
Abstract:
To provide a sanding device capable of stably dressing a sanding pad thereof in a relatively short time, and to provide a sanding pad dressing method for the same.
Dressing of the sanding pad is performed by a large pad dresser 84 having an outer diameter larger than that of a wafer holding head 14 for holding works, and thereafter, dressing of the sanding pad is performed by a small pad dresser having an outer diameter smaller than that of the large pad dresser 84, while moving the small pad dresser on the sanding pad.
Inventors:
NUMAMOTO MINORU
Application Number:
JP2001352928A
Publication Date:
May 20, 2003
Filing Date:
November 19, 2001
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
B24B53/017; B24B53/02; B24B53/12; H01L21/304; (IPC1-7): B24B37/00; B24B53/02; B24B53/12; H01L21/304
Attorney, Agent or Firm:
Kenzo Matsuura
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