Title:
GRINDING DEVICE
Document Type and Number:
Japanese Patent JP2018083252
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To reduce the weight of a grinding device without driving a turntable by an independent motor.SOLUTION: A grinding device (1) includes a turntable (9) for positioning a plurality of chuck tables (90) on a prescribed position. Each chuck table has a motor (94) respectively, and rotated and driven by the motor. The turntable is provided with a transfer mechanism (97) capable of transferring drive power of each motor to the turntable. The turntable is rotated by receiving drive power of each motor through the transfer mechanism, to thereby position each chuck tables on a prescribed position.SELECTED DRAWING: Figure 4
Inventors:
YAMANAKA SATOSHI
Application Number:
JP2016227993A
Publication Date:
May 31, 2018
Filing Date:
November 24, 2016
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B7/00; B24B41/06; H01L21/304
Domestic Patent References:
| JPS62107951A | 1987-05-19 | |||
| JPH11320358A | 1999-11-24 | |||
| JPS61252069A | 1986-11-10 | |||
| JP2000198054A | 2000-07-18 |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Amada Masayuki
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