Title:
SPINDLE UNIT AND GRINDING DEVICE
Document Type and Number:
Japanese Patent JP2018083253
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To stop supply of grinding water before the grinding water overflows to prevent damage of a spindle unit.SOLUTION: A spindle unit (42) includes: a spindle (55) formed with a through passage passing through its center; a mount (43) in which a grinding wheel (44) is attached to a lower end of the spindle; a casing (51) which rotatably supports an outer wall of the spindle; a supply part which supplies grinding water from a grinding water supply source to the through passage of the spindle; a discharge part which discharges the grinding water to grind stones of the grinding wheel from the through passage; a float (61) which is brough up by a water level of the grinding water in the through passage; and a sensor (67) which detects rising of the float.SELECTED DRAWING: Figure 3
Inventors:
OSHIDA KUNIO
Application Number:
JP2016227994A
Publication Date:
May 31, 2018
Filing Date:
November 24, 2016
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B57/02; B24B49/08; H01L21/304
Domestic Patent References:
| JPS63161657U | 1988-10-21 | |||
| JP2001009699A | 2001-01-16 | |||
| JP2002355764A | 2002-12-10 |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Amada Masayuki