Title:
ANODIZING DEVICE
Document Type and Number:
Japanese Patent JP3149060
Kind Code:
B2
Abstract:
PURPOSE: To enhance a processing capacity in safety, and what is more, without metal contamination by an electrode in an anodizing device which carries out anodizing reaction by arranging a processed board and electrodes in electrolytic solution and applying voltage.
CONSTITUTION: In an anodizing device which has a processed board and electrodes in electrolytic solution and carries out anodizing reaction by applying voltage, a plurality of processed boards 1a to 1d are laid out with support means 4a to 4d and 5a to 5d and 5' at a specified span between a pair of electrodes 3a and 3b in the electrolytic solutions 6a to 6e along the electric line of force in a formation current and the electrolytic solutions 6a to be between the processed boards are electrically isolated from each other by means of the processed boards 1a to 1d and the board support means 4a to 4d and 5a to 5d and 5' in structure.
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Inventors:
Yasutomo Fujiyama
Kiyofumi Sakaguchi
Takao Yonehara
Kiyofumi Sakaguchi
Takao Yonehara
Application Number:
JP3132792A
Publication Date:
March 26, 2001
Filing Date:
January 23, 1992
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/3063; C25F3/30; H01L21/306; (IPC1-7): H01L21/3063; C25F3/30
Domestic Patent References:
| JP4274325A | ||||
| JP61147540A | ||||
| JP5546568A | ||||
| JP5353972A | ||||
| JP60198829A |
Attorney, Agent or Firm:
Johei Yamashita