Title:
HANDOTAISOCHINO SEIZOHOHO
Document Type and Number:
Japanese Patent JPS5162672
Kind Code:
A
Inventors:
TABATA AKIRA
INABA TOORU
INABA TOORU
Application Number:
JP13718274A
Publication Date:
May 31, 1976
Filing Date:
November 28, 1974
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
C23F1/10; C23F1/00; H01L21/306; (IPC1-7): C23F1/00; H01L21/306