Title:
HANDOTAISOCHINO SEIZOHOHO
Document Type and Number:
Japanese Patent JPS5162673
Kind Code:
A
Inventors:
TERADA CHIAKI
ABE KUNIO
KAMIOKA HAJIME
NAKAYAMA KAZUFUMI
TAKAGI MIKIO
ABE KUNIO
KAMIOKA HAJIME
NAKAYAMA KAZUFUMI
TAKAGI MIKIO
Application Number:
JP13753174A
Publication Date:
May 31, 1976
Filing Date:
November 27, 1974
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L21/768; H01L21/302; H01L21/306; (IPC1-7): H01L21/302; H01L21/94