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Patent Searching and Data


Title:
HARD COATING AND ITS FORMATION METHOD
Document Type and Number:
Japanese Patent JP2006124756
Kind Code:
A
Abstract:

To provide a hard-coated tool capable of suppressing the deposition resistance at a high-temperature state and diffusion of elements of a work material into a hard coating, and coping with readiness for dry cutting, higher speed and higher feed in the cutting operation.

A hard coating contains one or more kinds of elements selected from Groups 4a, 5a and 6a in the Periodic Table, and Al and Si, one or more kinds of elements selected from C and N, and S and O. A peak indicating the bonded state of S and O is detected on the surface of the hard coating by the electron spectroscopic analysis, and the hard coating in which the peak position to indicate the bonded state of S and O is in a range of 167-170 eV is formed by using at least two kinds of evaporation sources by physical vapor deposition of different plasma densities.


Inventors:
KUBOTA KAZUYUKI
Application Number:
JP2004312731A
Publication Date:
May 18, 2006
Filing Date:
October 27, 2004
Export Citation:
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Assignee:
HITACHI TOOL ENG
International Classes:
C23C14/06; B23B27/14; B23P15/28