To provide a heat resistant and oxidation resistant carbon film having excellent heat resistance and oxidation resistance, and a method for forming the same, and to provide a heat resistant and oxidation resistant carbon film-coated article and a method for producing the same.
(1) The heat resistant and oxidation resistant carbon film F has a composition comprising carbon as the main component and silicon, and has a silicon oxide-containing layer as the surface layer. (2) The heat resistance and oxidation resistant carbon film-coated article W is coated with the film. (3) The method for producing the heat resistant and oxidation resistant carbon film F includes: a step where a silicon-containing carbon film f1 is formed; and a step where the surface of the carbon film f1 formed in the above step is subjected to oxidation treatment, so as to form a silicon oxide-containing layer f2. (4) The method for producing an article includes a process where a heat resistant and oxidation resistant carbon film coating objective article is prepared, and the heat resistant and oxidation resistant carbon film F is formed at least on part of the surface of the article by the method (3), so as to obtain the heat resistant and oxidation resistant carbon film-coated article W.
YOKOTA KUMIKO
OHARA HISANORI
MIYAKE KOJI
NAKAHIGASHI TAKAHIRO
NIPPON ITF KK