PURPOSE: To prevent the reactive material from being blown off at the start of the reaction operation by providing at the inlet of reactive gas a means for reducing the speed at which reactive gas reaches the reactive material when the reactive gas flows into the reaction chamber at the start of the reaction.
CONSTITUTION: Prior to the start of a first reaction the reaction chamber 1 is in a vacuum state. The reaction operation is started in this state; the reactive gas flowing at a fast speed out of a reactive gas pipe 70, through which the reactive gas flows in and out, into the reaction chamber 1 is made to impinge against a shield plate 8 so as to lose some of its kinetic energy, directed upward and downward in the direction of the flow, and flows at a slower speed onto the reactive material 3 through upper and lower openings. Since the cross-sectional area for the passage becomes wider, the reactive gas reaches the reactive material at a reduced speed. It does not occur, therefore, for the reactive material 3 to be blown off.
| JPH01501730 | [Title of the Invention] A cooling method of a substance |
| JP2010025390 | HEATING AND COOLING DEVICE |
| JPS583508 | 【考案の名称】外壁の冷却装置 |
DOI TAKESHI
IKEUCHI MASAKI
YAMANAKA GOROU
MITSUBISHI ELECTRIC CORP