Title:
HEAT TREATMENT APPARATUS AND METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2005150696
Kind Code:
A
Abstract:
To provide a heat treatment apparatus and a method therefor capable of improving the yield of products by managing temperature in a rising(heating) process and a cooling(cooling/temperature control) process of a workpiece and uniforming the in-plane temperature distribution of the workpiece.
At least a wafer W is mounted on a mounting stage 22 heated to a specified temperature, the wafer W is separated from the mounting stage 22 and put close to or brought into contact with a workpiece temperature controlling means 23 of the specified temperature, and the wafer W is mounted on the mounting stage 22 and put close to or brought into contact with the workpiece temperature controlling means 23.
Inventors:
SHIZUKUISHI MOMOKO
YAEGASHI HIDETAMI
YAEGASHI HIDETAMI
Application Number:
JP2004292118A
Publication Date:
June 09, 2005
Filing Date:
October 05, 2004
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/027; (IPC1-7): H01L21/027
Domestic Patent References:
JP2000091218A | 2000-03-31 | |||
JP2001148281A | 2001-05-29 | |||
JP2001052983A | 2001-02-23 | |||
JP2000114151A | 2000-04-21 | |||
JPH08274015A | 1996-10-18 | |||
JP2002184682A | 2002-06-28 | |||
JP2002093687A | 2002-03-29 | |||
JPH09330865A | 1997-12-22 | |||
JPH10321493A | 1998-12-04 | |||
JP2002270484A | 2002-09-20 |
Attorney, Agent or Firm:
Kinoshita Shigeru
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