To provide a heat treatment apparatus in which the strain or deformation of an object to be treated is kept down satisfactorily.
The heat treatment apparatus includes a cooling chamber 160 for cooling the object M which is to be treated and heated. A cooling unit CU is arranged in the cooling chamber 160, which the unit includes: a conveyance device 10 for conveying a plurality of the objects M to be treated in a single row at the same time; and a mist cooling device 30 which is disposed to surround a conveying route of the conveyance unit 10 and from which a mist-shaped cooling liquid is supplied. The mist cooling unit 30 has: a plurality of tubular bodies 32, which are disposed around the conveying route in the peripheral direction thereof and to which the cooling liquid is supplied; and nozzle parts 34 which are arranged on each of the plurality of tubular bodies 32 while being parted from one another and are used respectively for jetting the mist-shaped cooling liquid toward the conveying route.
| JP2001070722A | 2001-03-21 | |||
| JP2010038531A | 2010-02-18 | |||
| JPH1150137A | 1999-02-23 | |||
| JPH11153386A | 1999-06-08 | |||
| JP2005002398A | 2005-01-06 | |||
| JP2001509547A | 2001-07-24 | |||
| JP2001070722A | 2001-03-21 |
Masatake Shiga
Hisanori Takahashi
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