Title:
HEAT TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP2003022982
Kind Code:
A
Abstract:
To provide a heat treatment device, with which uniform radiation can be performed while having high efficiency in the radiation of a lamp without the deformation or the like of a quartz window.
In a heat treatment device 26, a quartz window 14 is provided while dividing a heating source chamber 20 arranged with a lamp heater 12 and a treatment chamber 22 to arrange an object 2 to be treated. The quartz window 14 is curved toward the side of the lamp heater 12 to be projected in the form of dome, and formed thin toward a central part 14b of the top. A reflector 28 is formed so that a peripheral edge can be drooped and a droop 28a can surround a peripheral edge 2a of the object 2 to be treated on the upper side.
Inventors:
SHIGEOKA TAKASHI
Application Number:
JP2001207867A
Publication Date:
January 24, 2003
Filing Date:
July 09, 2001
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
C23C16/46; F27B17/00; H01L21/205; H01L21/22; H01L21/26; (IPC1-7): H01L21/26; C23C16/46; F27B17/00; H01L21/205; H01L21/22
Domestic Patent References:
| JP2002521817A | 2002-07-16 | |||
| JPH0845863A | 1996-02-16 | |||
| JP2000012480A | 2000-01-14 | |||
| JPH03276625A | 1991-12-06 | |||
| JPS63241923A | 1988-10-07 |
Foreign References:
| WO1999022402A2 | 1999-05-06 | |||
| WO1999007925A1 | 1999-02-18 |
Attorney, Agent or Firm:
Tadahiko Ito