Title:
熱処理装置およびその制御方法
Document Type and Number:
Japanese Patent JP5662845
Kind Code:
B2
Abstract:
A control unit can select a large-number control zone model in which the number of control zones, which are independently controlled, is large, and a small-number control zone model in which the number of control zones, which are independently controlled, is small. When a temperature is increased or decreased, the control unit can select the small-number control zone model so as to control, based on signals from temperature sensors of the respective control zones C1 . . . C5 whose number is small, heaters located on the respective control zones C1 . . . C5. When a temperature is stabilized, the control unit can select the large-number control zone model so as to control, based on signals signals from the temperature sensors of the respective control zones C1 . . . C10 whose number is large, the heaters located on the respective control zones C1 . . . C10.
Inventors:
吉 井 弘 治
山 口 達 也
王 文 凌
齋 藤 孝 規
山 口 達 也
王 文 凌
齋 藤 孝 規
Application Number:
JP2011044197A
Publication Date:
February 04, 2015
Filing Date:
March 01, 2011
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/31; C23C16/46; F27B5/16; F27B5/18; F27D7/06; F27D9/00; F27D19/00; H01L21/205; H01L21/22; H01L21/324
Attorney, Agent or Firm:
Katsunuma Hirohito
Hiroyuki Nagai
Katsuomi Isogai
Noted mound 聡
Junpei Okada
Woods Hideyuki
Yukihiro Hotta
Hiroyuki Nagai
Katsuomi Isogai
Noted mound 聡
Junpei Okada
Woods Hideyuki
Yukihiro Hotta