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Title:
Heat treatment on heat treated ceramic substrates with ceramic coatings and coated ceramics
Document Type and Number:
Japanese Patent JP6293064
Kind Code:
B2
Abstract:
A heat treated ceramic article includes a ceramic substrate and a ceramic coating on the ceramic substrate. The ceramic coating is a non-sintered ceramic coating that has a different composition than the ceramic substrate. The heat treated ceramic article further includes a transition layer between the ceramic substrate and the ceramic coating, the transition layer comprising first elements from the ceramic coating that have reacted with second elements from the ceramic substrate, wherein the transition layer has a thickness of about 0.1 microns to about 5 microns.

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Inventors:
Jennifer wai sun
Ren-Guang Duane
Villaja Earl Canungo
Dmitry Rubomirsky
Application Number:
JP2014558807A
Publication Date:
March 14, 2018
Filing Date:
February 20, 2013
Export Citation:
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Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
C04B41/87; C04B41/80; C04B41/89; H01L21/3065
Domestic Patent References:
JP2002001865A
JP2008273823A
JP2007070175A
JP2005240171A
JP2007530792A
JP7075893A
Attorney, Agent or Firm:
Yoshiaki Anzai



 
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