Title:
酸化物単結晶の熱処理方法
Document Type and Number:
Japanese Patent JP7095403
Kind Code:
B2
Abstract:
To provide a method of heat-treating an oxide single crystal in which a ceramic-made container houses an oxide single crystal ingot 1 raised in a lifting method, and is placed on a flat furnace bottom 6 of a heating furnace.SOLUTION: A ceramic-made container consists of an inside container 3 which has a group of pellets 5, made of the same material with an oxide single crystal, spread over an inner bottom face, and houses an ingot 1 across the group of pellets 5 interposed, and an outside cylinder body 2 which has an inner diameter larger than the external diameter of the inside container and is arranged surrounding an outer peripheral surface of the ingot. While a plate-like spacer 4 is interposed between the flat furnace bottom 6 and the inside container and outside cylinder body mounted on the flat furnace bottom, heating air in a heating furnace is supplied to an exposed inside container outer bottom face, and heating air is supplied from the gap between the inside container and outside cylinder body into the outside cylinder body so as to perform a heat treatment for reducing thermal strain of the ingot.SELECTED DRAWING: Figure 1
Inventors:
Yasuhiro Obo
Application Number:
JP2018099524A
Publication Date:
July 05, 2022
Filing Date:
May 24, 2018
Export Citation:
Assignee:
Sumitomo Metal Mining Co., Ltd.
International Classes:
C30B33/02; C30B29/30
Domestic Patent References:
| JP59227799A | ||||
| JP57003800A | ||||
| JP54005900A | ||||
| JP7187898A | ||||
| JP2017193453A | ||||
| JP9295899A | ||||
| JP2002198762A | ||||
| JP2006342029A | ||||
| JP2005330122A |
Foreign References:
| CN101956236A |
Attorney, Agent or Firm:
Ueda Shozo
Koizumi Masahiro
Koizumi Masahiro