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Title:
HEAT TREATMENT METHOD FOR SHEET-FORM SUBSTRATE AND FURNACE TOOL USED THEREIN
Document Type and Number:
Japanese Patent JP2002267369
Kind Code:
A
Abstract:

To provide a heat treatment method capable of being executed even in a heat treatment furnace capable of improving productivity per an installation area of the furnace in heat treatment for a sheet-form substance, such as a solar battery substance, etc., and capable of being executed even in a heat treatment furnace not using a conveying means, such as a mesh belt, being high in thermal capacity.

The method is a method to effect heat treatment of a sheet-form substrate in a radiation heating type heat treatment furnace provided at an upper part in the furnace with a heating means. The two sheet-form substrates make one set, the two sheet-form substrates 1a and 1b of each set are positioned opposite to each other, and supported in a valley-form state that an upper part is opened and a low part is closed, and contained in the furnace to perform heat treatment.


Inventors:
MIYATA JOTARO
Application Number:
JP2001068903A
Publication Date:
September 18, 2002
Filing Date:
March 12, 2001
Export Citation:
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Assignee:
NGK INSULATORS LTD
International Classes:
F27B9/24; F27B9/26; F27B9/36; F27D3/12; H01L21/26; H01L21/68; H01L21/683; H01L31/04; (IPC1-7): F27B9/24; F27B9/26; F27B9/36; F27D3/12; H01L21/26; H01L21/68; H01L31/04
Attorney, Agent or Firm:
Ippei Watanabe