Title:
ヒーター電極構造
Document Type and Number:
Japanese Patent JP3610729
Kind Code:
B2
More Like This:
Inventors:
Toru Hatanaka
Tsuruta Shoji
Tsuruta Shoji
Application Number:
JP16290797A
Publication Date:
January 19, 2005
Filing Date:
June 19, 1997
Export Citation:
Assignee:
Mitsubishi Sumitomo Silicon Co., Ltd.
International Classes:
H05B3/20; C30B15/14; F27D11/02; H05B3/14; (IPC1-7): F27D11/02; C30B15/14; H05B3/14; H05B3/20
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Shigeo Naruse
Kobayashi Yoshinori
Masakazu Aoyama
Sonoda Yoshitaka
Suzuki Mitsuyoshi
Yutaka Matsutomi
Kazuya Nishi
Kenichi Imamura
Yasuhiko Murayama
Mitsuru Oba
Tadashi Takahashi
Takashi Watanabe
Shigeo Naruse
Kobayashi Yoshinori
Masakazu Aoyama
Sonoda Yoshitaka
Suzuki Mitsuyoshi
Yutaka Matsutomi
Kazuya Nishi
Kenichi Imamura
Yasuhiko Murayama
Mitsuru Oba