Title:
HEATER FOR VACUUM DEVICE
Document Type and Number:
Japanese Patent JP3462653
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a heater capable of preventing the occurrence of nonuniform temps. and easily controlling the heating temp. and heating time by eliminating direct contact of a body to be heated with the heater.
SOLUTION: This heater for a vacuum device consisting of a vertical liner heating element 5, a horizontal linear heating element 6 and a structure 1 for holding a reticular shape formed by knitting the heating elements 5 and 6 vertically and horizontally. The heating elements 5 and 6 are formed by sheathing a conductive heating element 7 with an insulator 8, a difference in heat generating density is made between the heating elements 5 and 6 so that there is a difference in heat generating density between unit faces.
Inventors:
Akira Yamada
Application Number:
JP507596A
Publication Date:
November 05, 2003
Filing Date:
January 16, 1996
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES,LTD.
International Classes:
B01J3/00; C23C14/34; C23C14/50; C23C16/46; (IPC1-7): B01J3/00; C23C14/34; C23C14/50; C23C16/46
Domestic Patent References:
| JP7332063A | ||||
| JP643980A |
Attorney, Agent or Firm:
Takehiko Suzue
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