Title:
加熱装置、蒸発源装置、成膜装置、成膜方法および電子デバイスの製造方法
Document Type and Number:
Japanese Patent JP7241604
Kind Code:
B2
Abstract:
Provided is technology for performing preferable film formation by properly heating a deposition material. The heating device for heating a container, wherein the container has an opening through which a deposition material is discharged, a first area, and a second area spaced apart from the opening more than the first area, comprises: a first heater for heating a first area; a second heater for heating a second area; and a control unit for independently controlling each heater. The second heater includes the first and second portions, and the distance between the second portion and the first heater is smaller than the distance between the first portion and the first heater. The control unit integrally controls the first and second portions when controlling the second heater. The heating device further comprises an inner heat reflecting member disposed between the second portion and the container, and shielding heat emitted to the container from the second portion to allow incident energy on an area facing the first portion in the container to be greater than incident energy on an area facing the second portion.
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Inventors:
Yuki Sugawara
Yoshiaki Kazama
Yoshiaki Kazama
Application Number:
JP2019099567A
Publication Date:
March 17, 2023
Filing Date:
May 28, 2019
Export Citation:
Assignee:
Canon Tokki Co., Ltd.
International Classes:
C23C14/24; H05B33/10; H10K50/00
Domestic Patent References:
| JP2014105375A | ||||
| JP2019031705A | ||||
| JP2011162846A | ||||
| JP2017020099A |
Foreign References:
| WO2017010243A1 |
Attorney, Agent or Firm:
Patent Attorney Corporation Shuwa Patent Office