To provide a technique for prolonging the life of a heater for heating a substrate in a vacuum treating device.
This heating device 18 has two planar bodies 53 and 54 consisting of carbon materials and a sheath heater 55 between the planar bodies. On the whole surfaces of the planar bodies 53 and 54 an aluminum film 61 is deposited as an underlayer film and an alumina film 62 is deposited on the aluminum film 61. As the deposited aluminum film 61 has tight adhesion with the alumina film 62, the uderlayer film, the adhesive strength and rupture strength of the alumina film 62 are more improved so that it is made to be hardly peeled. In this way, the planar bodies 53 and 54 are not exposed in the atmosphere over a long period of time and are not directly exposed to cleaning gas plasma. Thus, the planar bodies 53 and 54 are made to be hardly corroded so that the life of the heating device 18 is prolonged.
IKEDA YOSHINAO
KIKUCHI MASASHI
SHIMIZU YASUO
KANEDA TOSHINOBU
SAITO KAZUYA
ISHIKAWA MICHIO
HASHIMOTO YUKINORI
Next Patent: ETCHING SYSTEM AND ULTRASONIC VIBRATING DEVICE FOR ETCHING SOLUTION