Title:
HEATING LAMP AND HEATING DEVICE INCLUDING THE SAME
Document Type and Number:
Japanese Patent JP2023105769
Kind Code:
A
Abstract:
To provide a heating lamp and a heating device including the same capable of uniformly raising a wafer to a required temperature in a short time.SOLUTION: A lamp 100 for heating includes a metal heat dissipation substrate 102, an insulating layer 104 disposed on the heat dissipation substrate 102, a plurality of wiring patterns 106 arranged on the insulating layer 104, a plurality of light source elements 108 respectively arranged on the plurality of wiring patterns 106, a bonding material 109 electrically bonding the wiring pattern 106 and the light source element 108, and a metal wiring 110 electrically connecting adjacent light source elements 108.SELECTED DRAWING: Figure 1
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Inventors:
GODA TETSUYA
YAMASHITA KENICHI
KINOSHITA MASAAKI
YAMASHITA KENICHI
KINOSHITA MASAAKI
Application Number:
JP2022013291A
Publication Date:
July 31, 2023
Filing Date:
January 31, 2022
Export Citation:
Assignee:
PHOENIX ELECTRIC CO LTD
International Classes:
H01L21/26
Attorney, Agent or Firm:
Yuji Tada
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