Title:
HEATING LIGHT SOURCE DEVICE, HEATING LIGHT SOURCE MODULE AND OPTICAL HEATING SYSTEM
Document Type and Number:
Japanese Patent JP2022172776
Kind Code:
A
Abstract:
To provide a heating light source device, a heating light source module and an optical heating system, which can be used for heat treatment of a substrate to be treated having a various sizes and shapes, and in which uneven irradiation onto the irradiated surface of the substrate to be treated is suppressed.SOLUTION: There is provided a heating light source device in which a plurality of heating light source modules are arranged. Each of the heating light source modules includes a light-emitting element substrate, a plurality of light-emitting elements mounted on the light-emitting element substrate, and a cooling member in contact with a surface that is opposite to a surface on which the light emitting elements are mounted, of the surfaces of the light-emitting element substrate. The cooling member includes a cooling channel which is formed inside the cooling member and which communicates a cooling medium for cooling the light-emitting elements, an inlet port which introduces the cooling medium into the cooling channel, and an outlet port which discharges the cooling medium to the outside of the cooling member from the cooling channel. The cooling channel has a spiral shape moving gradually from a center portion side of the light-emitting element substrate to a circumferential edge portion side thereof as viewed from a direction orthogonal to a main surface of the cooling member.SELECTED DRAWING: Figure 5
Inventors:
INOUE TAKAHIRO
Application Number:
JP2021078972A
Publication Date:
November 17, 2022
Filing Date:
May 07, 2021
Export Citation:
Assignee:
USHIO ELECTRIC INC
International Classes:
H01L21/26
Attorney, Agent or Firm:
Patent Business Corporation Unias International Patent Office