To provide a heating treatment device equipped with a function capable of cooling the hot plate of the heating treatment device quickly rather than the case of simply naturally cooling the hot plate.

A fin is formed on an outer peripheral wall 66 surrounding the outer periphery of a support 65 for supporting a hot plate 70 inside a post- exposure baking unit 41. When cooling the hot plate 70, air is blown from a nozzle 67 to this fin and heat stored in the outer peripheral wall 66 is radiated.