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Title:
HEATING VESSEL IN ORGANIC THIN FILM DEPOSITION SYSTEM
Document Type and Number:
Japanese Patent JP2004091926
Kind Code:
A
Abstract:

To prevent a clogging phenomenon that an organic substance is recrystallized and stuck to the inside of a cover, particularly, to a nozzle part.

A heating vessel 50 in an organic thin film deposition system comprising a body 51 formed so as to store an organic substance 57 at the inside, a cover 41 bonded with the body 51, and formed of an insulating substance and provided with a nozzle 42 through which the organic substance 57 is discharged, a cover heater 43 for a thin film deposited closely to the upper face of the cover 41, and a body heater 53 set so as to surround the body is provided. A clogging phenomenon that the organic substance 57 is recrystallized and stuck to the inside of the cover 41, particularly, to the part of the nozzle 42 is prevented, and the temperature can easily be measured and controlled.


Inventors:
CHOE YUN SOO
SONG OK KEUN
KIM HYUNG MIN
UJIHARA TAKASHI
WAKIMOTO TAKEO
HASHIMOTO TAKAFUMI
Application Number:
JP2003311324A
Publication Date:
March 25, 2004
Filing Date:
September 03, 2003
Export Citation:
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Assignee:
SAMSUNG NEC MOBILE DISPLAY CO
International Classes:
C23C14/12; C23C14/24; H05B33/10; (IPC1-7): C23C14/12
Domestic Patent References:
JPH03177562A1991-08-01
JP2000160328A2000-06-13
JPH10195639A1998-07-28
JP2000223269A2000-08-11
JPH05503317A1993-06-03
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura



 
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