Title:
HIGH CONDUCTIVE NONCRYSTAL THIN FILM AND PREPARATION THEREOF
Document Type and Number:
Japanese Patent JPH03201321
Kind Code:
A
Abstract:
PURPOSE: To prevent a film having excellent conductivity from being peeled off from a deposition substrate by mainly including silicone halide and/or carbon halide, and incorporating an alkaline metal in the film.
CONSTITUTION: A high conductive noncrystal thin film includes mainly silicone halide and/or carbon halide, and incorporates an alkaline metal therein. The silicone halide and/or carbon halide is preferable in ratio 50-99atm%. The alkaline metal is one kind or more selected from, for example, Li, Na, K and the like, and 1-20atm% is preferable. Consequently, excellent metallic conductivity, and chemical stability (weather resistance), the property of which cannot be changed in the atmosphere for a long period, can be obtained.
Inventors:
SUGIMOTO IWAO
MIYAKE SHOJIRO
FUNAKOSHI NORIHIRO
MIYAKE SHOJIRO
FUNAKOSHI NORIHIRO
Application Number:
JP135790A
Publication Date:
September 03, 1991
Filing Date:
January 08, 1990
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
C03C3/04; C03C4/14; H01B1/04; H01B1/08; H01B5/14; H01B13/00; H01L21/203; (IPC1-7): C03C3/04; C03C4/14; H01B1/04; H01B1/08; H01B5/14; H01B13/00; H01L21/203
Attorney, Agent or Firm:
Amamiya Masaki