Title:
高周波デバイス
Document Type and Number:
Japanese Patent JP7103807
Kind Code:
B2
Abstract:
To control a high frequency characteristic with high accuracy.SOLUTION: A high frequency device includes: a substrate; a ground pattern provided on the substrate; a signal line, which is provided on the same surface as the surface on which the ground pattern of the substrate is provided, or a different surface, to form a transmission line which transmits a high frequency signal along with the ground pattern; a plurality of movable electrodes, overlaid with the signal line by the intermediary of a gap in the thickness direction of the substrate to have a mutually different overlaid area with the signal line, which can be driven in the thickness direction; and a stationary electrode, overlaid with the plurality of movable electrodes by the intermediary of the gap in the thickness direction, which sucks the movable electrodes by the application of a drive voltage between the plurality of movable electrodes and itself.SELECTED DRAWING: Figure 6
Inventors:
Yoshio Sato
Kazuhiko Kobayashi
Kazuhiro Matsumoto
Takashi Matsuda
Kazuhiko Kobayashi
Kazuhiro Matsumoto
Takashi Matsuda
Application Number:
JP2018044680A
Publication Date:
July 20, 2022
Filing Date:
March 12, 2018
Export Citation:
Assignee:
TAIYO YUDEN CO.,LTD.
International Classes:
H01P5/04; H01G5/16; H01P1/18; H03H7/20
Domestic Patent References:
| JP2004282150A |
Attorney, Agent or Firm:
Shuhei Katayama