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Title:
HIGH SPEED DRYING DEVICE
Document Type and Number:
Japanese Patent JP3887570
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To quickly dry a washed body washed by non-volatile liquid or volatile liquid at a low cost, while avoiding surface oxidation of the washed body.
SOLUTION: Residual washing liquid of the washed body is removed up to the extent without allowing air oxidation of the surface of the washed body by the existence of the residual washing liquid. Just after the removing, the washed body is placed in a superdry environment to completely remove the residual washing liquid of the washed body.


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Inventors:
Takemori Toshinori
Masaki Mogi
Application Number:
JP2002040052A
Publication Date:
February 28, 2007
Filing Date:
February 18, 2002
Export Citation:
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Assignee:
Kyowa Kako Co., Ltd.
International Classes:
F26B15/00; F26B5/00; F26B5/14; F26B15/12; F26B21/00; H01L21/00; H01L21/304; (IPC1-7): F26B15/00; F26B5/00; H01L21/304
Domestic Patent References:
JP8179700A
JP11316084A
JP2001311814A
Attorney, Agent or Firm:
Minoru Nakamura
Amamiya
Fumiaki Otsuka
Sadao Kumakura
Shishido Kaichi
Hideto Takeuchi
Toshio Imajo
Nobuo Ogawa
Village shrine Atsuo
Takaki Nishijima
Atsushi Hakoda



 
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