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Title:
HIGH TEMPERATURE MECHANO-CHEMICAL POLISHING METHOD AND DEVICE
Document Type and Number:
Japanese Patent JP2005081485
Kind Code:
A
Abstract:

To provide a high temperature mechano-chemical polishing method and a device, mechano-chemically polishing a work piece at a high temperature in an open atmosphere, facilitating approach to a work piece in the process of polishing, a polishing plate and abrasive grains, having high workability, and remarkably heightening the machining efficiency.

The work piece 1 is held by two flat plates (a polishing plate 12 and a work holding plate 16), one or both of the flat plates are heated to raise the temperature of the work piece, and while fine particles 2 causing mechano-chemical action are supplied between the work piece and at least one flat plate, the work piece is mechano-chemically polished at a high temperatures.


Inventors:
YASUNAGA NOBUO
YAMAMOTO KOJI
Application Number:
JP2003315668A
Publication Date:
March 31, 2005
Filing Date:
September 08, 2003
Export Citation:
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Assignee:
TUBE SYSTEMS KK
YASUNAGA NOBUO
International Classes:
B24B1/00; (IPC1-7): B24B1/00
Attorney, Agent or Firm:
Minoru Hotta