Title:
高均質の光学用合成石英ガラスおよびその製造方法
Document Type and Number:
Japanese Patent JP4466979
Kind Code:
B2
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Inventors:
Tetsuji Ueda
Hiroyuki Nishimura
Akira Fujinoki
Hiroyuki Nishimura
Akira Fujinoki
Application Number:
JP2000024358A
Publication Date:
May 26, 2010
Filing Date:
February 01, 2000
Export Citation:
Assignee:
Shin-Etsu Quartz Products Co., Ltd.
International Classes:
C03B20/00; H01L21/027; C03B19/14; C03C3/06; F27B5/10; G02B1/00
Domestic Patent References:
| JP7277755A | ||||
| JP7187684A | ||||
| JP10324538A |
Attorney, Agent or Firm:
Masahisa Takahashi