Title:
HOLDING DEVICE OF GLASS MASK, EXPOSING DEVICE AND INSPECTING DEVICE HAVING SAME, AND HOLDING, PRODUCING AND INSPECTING METHODS OF GLASS MASK
Document Type and Number:
Japanese Patent JPH09258432
Kind Code:
A
Abstract:
To hold a glass mask without deformation or strain and to produce and inspect a glass mask.
A recessed part 62 of the main body 61 is filled with a nonvolatile liquid 66 having specific gravity larger than that of a glass mask 11. Reference blocks 64a to 64d are movable and used to hold the glass mask 11 by giving specified stress to the side faces of the mask 11 which is floating on the liquid 66. The reference blocks 64a to 64d are equipped with pressure sensors to adjust the stress added to the side faces of the glass mask 11. By using this holding device, a glass mask is produced and inspected.
Inventors:
HIGAKI TOMOTAKA
Application Number:
JP6472096A
Publication Date:
October 03, 1997
Filing Date:
March 21, 1996
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
G03F1/76; H01L21/027; H01L21/66; (IPC1-7): G03F1/08; H01L21/027; H01L21/66
Attorney, Agent or Firm:
Takehiko Suzue
Previous Patent: PHOTOMASK AND PRODUCTION OF THREE-DIMENSIONAL CIRCUIT FORMED BODY USING THE SAME
Next Patent: MASK
Next Patent: MASK