Title:
HOLDING DEVICE
Document Type and Number:
Japanese Patent JP2022028220
Kind Code:
A
Abstract:
To provide a holding device in which a thickness of a plate member is suppressed while being provided with a first heater and a second heater divided into two layers in the plate member.SOLUTION: A holding device 100 comprises a plate member 10 that includes: a plate-shaped base material 11, which includes a front surface S1 and a back surface S2 substantially orthogonal to a first direction; a plurality of first heaters 500, which is installed inside the base material 11 so that one heater is assigned to each first area H1 when the base material 11 is divided into a virtual plurality of first areas H1 in the first direction view; power supply-side driver electrodes 61 for the first heater, which is electrically connected to one end of the first heater 500; a ground-side driver electrode 62 for the first heater, which is electrically connected to the other end of the first heater 500; a plurality of second heaters 600; and a ground-side driver electrode 162 for the second heater.SELECTED DRAWING: Figure 2
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Inventors:
KIBE TAICHI
Application Number:
JP2020131510A
Publication Date:
February 16, 2022
Filing Date:
August 03, 2020
Export Citation:
Assignee:
NGK SPARK PLUG CO
International Classes:
H01L21/683; H05B3/03
Attorney, Agent or Firm:
Akatsuki Joint Patent Office