Title:
保持装置
Document Type and Number:
Japanese Patent JP7108586
Kind Code:
B2
Abstract:
To provide another technique capable of suppressing breakage of a joint in a holding device that holds an object.SOLUTION: A holding device includes a ceramic portion that is mainly composed of ceramic, is formed in a plate shape, and has a mounting surface on which an object is placed, a metal portion that is mainly composed of a metal, is formed in a plate shape, and is arranged on the side opposite to the mounting surface with respect to the ceramic portion, and a joint portion that is placed between the ceramic portion and the metal portion, and joins the ceramic portion and the metal portion, and the joint portion includes a wound body obtained by alternately winding a first joint portion made of a material containing a metal as a main component and a second joint portion made of a material containing a fiber containing an inorganic substance as a main component.SELECTED DRAWING: Figure 2
Inventors:
Suzuki Atsushi
Application Number:
JP2019149274A
Publication Date:
July 28, 2022
Filing Date:
August 16, 2019
Export Citation:
Assignee:
Nippon Special Ceramics Co., Ltd.
International Classes:
H01L21/683; C04B37/02
Domestic Patent References:
| JP2007035878A | ||||
| JP2016012608A | ||||
| JP2006143580A | ||||
| JP2013511162A | ||||
| JP2019040998A |
Foreign References:
| WO2013118781A1 |
Attorney, Agent or Firm:
Junya Tanabe
Mayu Honda
Mayu Honda