PURPOSE: To obtain stable discharge without developing abnormal discharge even at the time of using for a long time by preventing leakage of plasma source gas at connecting part between stinger rod and cathode in an HCD gun for ion plating.
CONSTITUTION: The HCD gun has the stinger rod 1 providing water cooling pipe 9 and Ar introducing pipe 10, and a chuck 2 for fixing the cathode 3 at tip part thereof. A Ta-made ion protector 11 having small hole for uniformly introducing Ar gas into the cathode 3 is disposed between the end face of rod 1 and the cathode 3. In this HCD gun, metal packing 12 of copper, etc., is inserted between the cathode 3 and the rod 1 to perfectly seal the connecting part between the both. By this method, flowing-out of Ar gas from the connecting part between the cathode 3 and the rod 1 can be prevented and the HCD gun without developing the abnormal discharge is obtd.
SUZUKI KAZUHIRO
KOBAYASHI YASUHIRO
