オブジェクトのプロファイルを定義する方法及びオブジェクトのプロファイルを再構成する方法

Japanese Patent JP5248569

B2

Building of a model profile for a target is disclosed. An embodiment of the method includes importing an image of a known object and superimposing, on this image, either by hand or automatically, an estimated profile. The estimated profile is defined mathematically and adjusted segment by segment in order to match the image such that the adjusted estimated profile may be stored alongside a diffraction spectrum associated with the image. Alternatively or additionally, a user may trace (or free-draw) the profile of a known image and subsequently map a shape-definer of a mathematical function such as a polynomial equation, a spline or a vector onto the estimated profile in order to obtain a profile and one or more variables of that profile that may be used to reconstruct the profile of an unknown object from its diffraction pattern.

JP2000153210	ROTARY SUBSTRATE TREATING DEVICE
JPH11145055	SUBSTRATE PROCESSING EQUIPMENT
JPS5528078	PRODUCTION OF MASK

Cramel, Hugo, Augustine, Joseph
Keels, Antoine Guston Marie
Van der Ploug, Durku, Aux
Naumoski, Gosse
Van wheel, roland, mark

JP2010218130A

July 31, 2013

September 29, 2010

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AS M Netherlands B.V.

H01L21/027; G01B11/24; G01B15/04; G03F7/20

JP2005534192A
JP2005257690A
JP2003521727A
JP2005315742A
JP2005172830A
JP6117844A
JP2001084403A
JP7210679A

Yoshiyuki Inaba
Toshifumi Onuki

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