Title:
ワイヤソー及びワイヤソーのワークの搬入出方法
Document Type and Number:
Japanese Patent JP7372097
Kind Code:
B2
Abstract:
To provide a wire saw which enables improvement of productivity.SOLUTION: A wire saw 1 is a cutting device which cuts a workpiece W with a wire 53. The wire saw 1 includes: temporary placing tables 11, 12 for supporting the workpiece W; a transfer device 4 which includes a slider 45 for supporting the workpiece W and carries the workpiece W into a processing chamber R/out from the processing chamber R; a processing device 5 which is disposed at the processing chamber R and processes the workpiece W; a clamp device 2 which is disposed at the processing chamber R and clamps the workpiece W; and a lifting device 3 which moves up or down the clamp device 2. The transfer device 4 transfers the workpiece W from the temporary placing tables 11, 12 to the processing chamber R.SELECTED DRAWING: Figure 1
Inventors:
Tetsuya Nakamura
Tomoyuki Kawazu
Yasuo Hasegawa
Katsuhiko Abe
Masaaki Takahashi
Tomoyuki Kawazu
Yasuo Hasegawa
Katsuhiko Abe
Masaaki Takahashi
Application Number:
JP2019172352A
Publication Date:
October 31, 2023
Filing Date:
September 20, 2019
Export Citation:
Assignee:
Komatsu NTC Ltd.
International Classes:
B24B27/06; B24B41/06; B28D5/04; B28D7/04; H01L21/304
Domestic Patent References:
| JP10128736A | ||||
| JP11188600A | ||||
| JP2009196851A | ||||
| JP3149153A | ||||
| JP2000218499A | ||||
| JP11291152A | ||||
| JP11291154A |
Foreign References:
| WO2012031900A1 |
Attorney, Agent or Firm:
Patent Attorney Corporation Isono International Patent and Trademark Office
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