Title:
How to manufacture the member which has a film on the surface
Document Type and Number:
Japanese Patent JP6137041
Kind Code:
B2
Inventors:
Atsushi Imai
Jiro Nohara
Jiro Nohara
Application Number:
JP2014092555A
Publication Date:
May 31, 2017
Filing Date:
April 28, 2014
Export Citation:
Assignee:
TOYOTA JIDOSHA KABUSHIKI KAISHA
International Classes:
C23C14/04; C23C16/04; H01L21/285; H01L21/677
Domestic Patent References:
| JP54018671A | ||||
| JP60174875A | ||||
| JP63069962A | ||||
| JP2000160323A | ||||
| JP2003027212A | ||||
| JP2014049612A | ||||
| JP2010153088A | ||||
| JP2009127128A | ||||
| JP2006188752A |
Foreign References:
| US20060148368 | ||||
| US20060110904 |
Attorney, Agent or Firm:
Kaiyu International Patent Office
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