Title:
太陽電池の製造方法
Document Type and Number:
Japanese Patent JP5842168
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method capable of manufacturing a solar cell having improved output characteristics.SOLUTION: A solar cell manufacturing method comprises: forming i-type semiconductor layers 12, 14 on substrates 10 fixed to a tray 20; subsequently performing a semiconductor layer formation process of forming semiconductor layers 11, 13 each doped with a dopant; and bombarding, after the semiconductor layer formation process, at least one of hydrogen radicals and hydrogen ions on the tray 20.
Inventors:
Tomoki Ueyama
Kai Mikihide
Masaki Shima
Kai Mikihide
Masaki Shima
Application Number:
JP2011126234A
Publication Date:
January 13, 2016
Filing Date:
June 06, 2011
Export Citation:
Assignee:
Panasonic IP Management Co., Ltd.
International Classes:
H01L31/18
Domestic Patent References:
| JP2009120937A |
Attorney, Agent or Firm:
Hiromori Arai
Eisaku Teratani
Shinichi Michisaka
Eisaku Teratani
Shinichi Michisaka