Title:
アナログリセットを備える静電容量型マイクロメカニカルセンサの動作方法、および、上記静電容量型マイクロメカニカルセンサ用の回路構成
Document Type and Number:
Japanese Patent JP5624073
Kind Code:
B2
Abstract:
A method and a switch arrangement for operating a micromechanical capacitive sensor having at least one and at most two fixed electrodes and one differential capacitor formed by a movable central electrode that can be deflected by an external force, wherein the deflection of the electrode is measured. A fraction of the force acting on the central electrode, corresponding to the electrostatic restorative force, is compensated. Under closed-loop operation, a selection signal is influenced by a regulator supplementing a restore crosstalk signal so that the created capacitive restorative force acts in a compensatory manner against deflection of the central electrode.
Inventors:
スパーリンガー，ギュンター
Application Number:
JP2012064473A
Publication Date:
November 12, 2014
Filing Date:
March 21, 2012
Export Citation:
Assignee:
ノースロップグルマン リテフ ゲーエムベーハーＮｏｒｔｈｒｏｐ Ｇｒｕｍｍａｎ ＬＩＴＥＦ ＧｍｂＨ
International Classes:
G01P15/13; B81B7/00; G01C19/56; G01P15/125; G01P15/18
Attorney, Agent or Firm:
Patent business corporation HARAKENZO WORLD PATENT & TRADEMARK