Title:
シリコン単結晶の引上げ方法
Document Type and Number:
Japanese Patent JP4788445
Kind Code:
B2
Inventors:
Hideki Fujiwara
Kenji Kawahara
Kenji Kawahara
Application Number:
JP2006103000A
Publication Date:
October 05, 2011
Filing Date:
April 04, 2006
Export Citation:
Assignee:
Sumco inc.
International Classes:
C30B29/06; C30B15/10
Domestic Patent References:
| JP11021196A | ||||
| JP2002539068A | ||||
| JP2003192391A | ||||
| JP2004002083A | ||||
| JP2000335999A |
Attorney, Agent or Firm:
Michio Mori