HYDROSTATIC BEARING, POINTING DEVICE AND ALIGNER

Japanese Patent JP2005032818

A

To make the dynamic gap variations of a static pressure fluid bearing almost zero when generated at the time movement of a vehicle.

An air supply hole 52 in which an orifice of a small diameter as compared with outside of the bearing is formed on a bearing surface 50 facing a movable guide 21 of a static pressure fluid bearing. A puppet valve 53 which can change continuously the flow resistance in the air supply hole 52, an actuator 55 for performing straight line drive of a puppet valve 53, and a guide mechanism 58 which guides the straight line movement of the puppet valve 53 are installed inside the static pressure fluid bearings 14, 24. In the actuator 55, e.g. a coil 56 is arranged on a movable side (base of the puppet valve 53), and a permanent magnet is arranged on a fixed side (a part position countering the base portion of the puppet valve 53), thereby driving the puppet valve 53 at high speed and high precision. The puppet valve 53 is driven based on a command from a controller 51. Ps is applied to puppet valve backpressure. Ps is narrowed by puppet valve and bearing clearance and becomes bearing average pressure p.

TSUI KOTARO
SAI CHOSHOKU

JP2003193634A

February 03, 2005

July 08, 2003

Click for automatic bibliography generation  

CANON KK

B23Q1/30; F16C29/02; F16C32/06; G03F7/20; H01J37/20; H01J37/305; H01L21/027; H01L21/68; (IPC1-7): H01L21/68; F16C32/06; G03F7/20; H01J37/20; H01J37/305; H01L21/027

JPH09293773A	1997-11-11
JPH0565920A	1993-03-19
JPH11108059A	1999-04-20
JPS63101515A	1988-05-06
JP2001132748A	2001-05-18
JPH05306718A	1993-11-19
JPH02278009A	1990-11-14

Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura

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