AUTOMATIC TRACKING DEVICE FOR SEM IMAGE

Title:

AUTOMATIC TRACKING DEVICE FOR SEM IMAGE

Document Type and Number:

Japanese Patent JPH0628994

Kind Code:

A

Abstract:

PURPOSE: To observe detailed parts easily and at high magnification without interruption the load test of a test piece, by automatically tracking the observation target of the test piece, moved by a load, to stop the movement of an apparent image to be displayed.

CONSTITUTION: An observation point 1 is moved when a test piece 1 is held with a test jig 2, and the load of tension or compression is applied by a load drive part 3. The move quantity is detected by a displacement detector 4, and is amplified by an amplifier to output a signal in proportion to the moved quantity. A signal cancelling the moved quantity is inputted in an image-shifting circuit to move the center point of an electron beam. This stops an observation point apparently to be displayed on a CRT even when the observation point A is moved.

More Like This:

JP2000097821	PREPARATION OF SAMPLE FOR TRANSMISSION ELECTRON MICROSCOPE OF GaAs, GaN-BASED COMPOUND SEMICONDUCTOR AND LAMINATED STRUCTURE ANALYSIS BY USING IT
JPS62238439	METHOD AND APPARATUS FOR SAMPLING MICROSCOPIC EXAMINATION SPECIMEN OF ELECTRON MICROSCOPE

Inventors:

HAKAMATA SADAYUKI

Application Number:

JP20448492A

Publication Date:

February 04, 1994

Filing Date:

July 07, 1992

Export Citation:

Click for automatic bibliography generation Help

Assignee:

INSUTORON JAPAN KK

International Classes:

H01J37/20; G01N3/06; H01J37/22; H01J37/28; (IPC1-7): H01J37/20; H01J37/22; H01J37/28

Attorney, Agent or Firm:

Toshi Inoguchi

Next Patent: SCANNING TYPE ELECTRON MICROSCOPE