Title:
CRYOPUMP AND DIRECTION CHANGING ADAPTOR
Document Type and Number:
Japanese Patent JPH0742670
Kind Code:
A
Abstract:
PURPOSE: To allow a pressure relief valve to be fitted in an optimum direction in the position where a pump is fitted so as to improve the maintainability of the pressure relief valve after the regeneration of a cryopump.
CONSTITUTION: An exhaust pipeline 15 at the regenerating time of a cryopump is removable. The exhaust pipeline 15 has a flange 11 with an even number of holes opened in symmetry in order to be fitted to a cryopump body 12. With the threaded holes well-fitted and except the direction of a motor 17, the direction of the exhaust pipeline 15 can be changed optionally. A pressure relief valve is thereby fitted in an optimum direction in the position where a pump is fitted.
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JPS60156983 | COLD TRAP |
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JPS62258176 | CRYOPUMP |
Inventors:
AOKI NORISHIGE
Application Number:
JP18602993A
Publication Date:
February 10, 1995
Filing Date:
July 28, 1993
Export Citation:
Assignee:
MATSUSHITA ELECTRONICS CORP
International Classes:
F04B37/08; F04B39/00; (IPC1-7): F04B37/08; F04B39/00
Attorney, Agent or Firm:
Akira Kobiji (2 outside)
Next Patent: CRYOPUMP WITH LOUVER BLIND TYPE BAFFLE