Title:
【発明の名称】ガス圧力測定方法
Document Type and Number:
Japanese Patent JP2864291
Kind Code:
B2
Abstract:
A non membrane-based overpressure proof gas pressure microsensor. Since it is not a membrane-based microsensor but is based on a open microbridge sensor structure (Fig. 8) it is not subject to breakage caused by overpressure. A method is described to determine gas pressure from thermal conductivity, k, and volumetric specific heat, cpv.
Inventors:
UURIHI BOON
Application Number:
JP33700690A
Publication Date:
March 03, 1999
Filing Date:
November 30, 1990
Export Citation:
Assignee:
HANEIUERU INC
International Classes:
G01L9/00; G01L7/00; G01L9/04; G01L11/00; G01L21/10; G01L23/00; (IPC1-7): G01L21/10
Domestic Patent References:
| JP6474428A |
Attorney, Agent or Firm:
Masaki Yamakawa (3 outside)