PURPOSE: To enhance the inspection quality of an IC and to enhance the actual operating time of an inspection apparatus by installing a detection part which detects a surge voltage generated at individual pins of the IC.

CONSTITUTION: An inspection apparatus is provided with a surge-voltage detection part which detects a surge voltage generated at individual pins of an IC and with an abnormality stop and control part which stops the operation of the apparatus when the surge voltage is generated. Then, during the inspection of the IC, the surge voltage is monitored always or during a designated period. In addition, when an abnormality is detected, the apparatus is stopped, the correction measure of a product is taken, and a maintenance operator is informed of the content of the abnormality so as to take the correction measure of the apparatus. That is to say, a level comparator 33 judges whether, e.g. an input voltage is higher than a comparison voltage 34 or lower than a comparison voltage 35 by using the comparison voltages 34, 35. Consequently, the allowable value of the surge voltage can be set by a program. When the surge voltage is generated and exceeds the comparison voltages 34, 35, the level comparator 33 outputs a surge detection signal 36.